Science Daily May 17, 2021
Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components – including diamond resonators and cavities. Researchers in Australia have developed a new hard masking method, which uses a thin metallic tungsten layer to pattern the diamond nanostructure, enabling the creation of one-dimensional photonic crystal cavities. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q-factors) approaching 1 × 104. They showed that the cavities can be picked up and transferred onto a trenched substrate to realize fully suspended diamond cavities. Their process relies on lower cost large polycrystalline diamond, which is available as large wafers, unlike the traditionally used high quality single crystal diamond. The fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond-based quantum photonic circuitry…read more. TECHNICAL ARTICLEÂ