Novel tin ‘bubbles’ spur advances in the development of integrated chips

EurekAlert  April 15, 2020 Low density materials can control plasma properties of laser absorption, which can enhance quantum beam generation. Researchers in Japan propose a target source based on a hollow sub-millimeter microcapsule fabricated from polyelectrolyte cationic and anionic surfactant on air bubbles. The lightweight microcapsules acted as a scaffold for surface coating by tin (IV) oxide nanoparticles. In a proof of concept study the laser conversion efficiency at 13.5 nm 2% bandwidth from the tin-coated microcapsule (0.8%) was competitive compared with bulk tin (1%). According to the researchers microcapsule aggregates could be utilized as a potential small scale/compact EUV source […]