MIT News June 1, 2020
Carbon nanotube field-effect transistors (CNFETs) have only been fabricated in academic or research laboratories. Developing a suitable method for depositing nanotubes uniformly over industry-standard large-area substrates has been the challenge for commercializing it. An international team of researchers (USA – MIT, industry, Canada) has shown that a deposition technique in which the substrate is submerged within a nanotube solution can allow CNFETs to be fabricated within industrial facilities. They have developed process modifications to standard solution-based methods accelerating the deposition process by more than 1,100 times and reducing cost. They have demonstrated uniform and reproducible CNFET fabrication across industry-standard 200 mm wafers, employing the same equipment currently being used to fabricate silicon product wafers…read more. TECHNICAL ARTICLE