Nanoelectromechanical resonators based on hafnia–zirconia–alumina superlattices with gigahertz spectrum coverage

Phys.org  August 2, 2023 Nanomechanical resonators that can operate in the super high frequency (3–30 GHz) or the extremely high frequency (30–300 GHz) regime could be of use in the development of stable frequency references, wideband spectral processors, and high-resolution resonant sensors. However, such operation requires the dimensions of the mechanical resonators to be reduced to tens of nanometres, and current devices typically rely on transducers, for which miniaturization and chip-scale integration are challenging. Researchers at the University of Florida integrated nanoelectromechanical transducers created using 10-nm-thick ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2) films on silicon and aluminium nitride membranes. They could yield resonators […]